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ECE 612 Lecture 18B: CMOS Process Flow
from [Audio] ECE 612: Nanoscale Transistors (Fall 2008) Hosted by Mark Lundstrom
For a basic, CMOS process flow for an STI (shallow trench isolation process), see: http://www.rit.edu/~lffeee/AdvCmos2003.pdf.This lecture is a condensed version of the more complete presentation (listed above) by Dr. Fuller.
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