EPISODE · Mar 27, 2026 · 1 MIN
氦原子束的「幽灵」：后 EUV 时代的亚纳米突围
from D. Brief
氦原子束的「幽灵」：后 EUV 时代的亚纳米突围：在挪威奥斯陆郊外一处不起眼的实验室里，由微软领投的初创公司 Lace 揭开了半导体工业最深处的秘密：氦原子束光刻（Helium Atom-Beam Lithography）。这项声称能将加工精度在现有 EUV（极紫外光）基础上再缩小 10…
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氦原子束的「幽灵」：后 EUV 时代的亚纳米突围
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