Hierarchical Physical Models for Analysis of Electrostatic Nanoelectromechanical Systems (NEMS)

This talk will introduce hierarchical physical models and efficient computational techniques for coupled analysis of electrical, mechanical and van der Waals energy domains encountered in Nanoelectromechanical Systems (NEMS). Numerical results will be presented for several silicon nanoelectromechanical switches to demonstrate the static electromechanical pull-in behavior.