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Plasma Removal Process
from [Audio] NACK Unit 3: Materials in Nanotechnology Hosted by Terry Kuzma, NACK Network
OutlinePart 1: Can be viewed hereIntroductionModels to understand the plasma processPart 2: This lectureChemistryAnalyzing recipe parameters, and the resultant etch profilesEndpoint
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This episode was published on March 27, 2018.
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