荏原、先端半導体向け－60℃極低温チラー、水・電力消費3～5割減

from 電波新聞デジタル · host 株式会社電波新聞社

「荏原、先端半導体向け－60℃極低温チラー、水・電力消費3～5割減」産業機械大手の荏原製作所は、同社初となる－60℃の極低温チラー「RJ-TTC型」を出荷開始した。半導体ウエハーの表面から不要部分を取り除くエッチング装置の冷却に用いる。

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荏原、先端半導体向け－60℃極低温チラー、水・電力消費3～5割減

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